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Excimer Laser Product List

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Excimer laser

Excimer laser

In addition to the ceramic chamber, it is equipped with a power feedback stable output mode function!

The "Excimer Laser" from ATL Lasertechnik is a compact, high-repetition, gas long-life, high-peak laser. It features a high-voltage switch that does not use a thyratron, and the optical system can be easily maintained with a cartridge-style replacement. Please feel free to contact us when you need assistance. 【Features】 ■ Ceramic chamber ■ High-voltage switch (thyratron not used) ■ Air-cooled ■ Easy maintenance (optical system replacement is cartridge-style) ■ Power feedback stable output mode function ■ External control via RS-485, RS-232, USB, optical interface *For more details, please download the PDF or feel free to contact us.

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Excimer laser

Excimer laser

We offer a wide range of laser output and energy options with excellent quality and performance!

Our high-energy UV pulses from the "Excimer Laser" can be utilized in microelectronics, displays, scientific research, medical applications, and thin film processing. We can accommodate the appropriate output levels from prototype to mass production. The uniform large-area flat-top beam covers the sample surface. Additionally, selective irradiation of laser energy is possible through low-temperature thin film processing. 【Features】 ■ Processing with large field sizes ■ Adjustable UV output ■ Selective irradiation of laser energy with low-temperature thin film processing ■ 50 years of experience with excimer lasers ■ A wide range of laser output and energy options available *For more details, please refer to the PDF document or feel free to contact us.

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[Application Example] Ablation of Surface and Sample

[Application Example] Ablation of Surface and Sample

Improving element/isotope analysis! Obtaining better data with a high signal-to-noise ratio.

In our products, we texture surfaces using USP lasers or employ nanosecond or ultrafast lasers for analytical methods (e.g., LIBS, LA-ICP-MS). The surfaces of robust and delicate materials can all be patterned using ultrafast laser beams or UV excimer lasers without thermal damage. The 193nm excimer laser has smaller particle sizes, higher signal intensity, and lower inherent fractionation. 【Features】 - Use of nanosecond laser flares to obtain better data with a high signal-to-noise ratio - Analysis of elemental and isotopic composition of solid samples using excimer lasers or fs laser amplifiers - Creation of ultimate surface patterns, including laser-induced periodic structures (LIPS) *For more details, please refer to the related links or feel free to contact us.

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Excimer Laser "GIGANEX"

Excimer Laser "GIGANEX"

Classifying colors and specifications by laser applications to meet various needs!

"GIGANEX" is an advanced excimer laser that consolidates the technology and know-how obtained from our excimer laser manufacturing for semiconductor lithography. It is expected to be applied in fields such as FPD manufacturing processes, flexible device manufacturing processes, and semiconductor manufacturing processes. 【Characteristics】 ■ Short wavelength (248nm, 351nm) ■ High output (120W to 600W) ■ High frequency (4000Hz to 6000Hz) *For more details, please download the PDF or feel free to contact us.

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